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Energy-band Alignment of (hfo2)(x)(al2o3)(1-x) Gate Dielectrics Deposited by Atomic Layer Deposition on Beta-ga2o3 (-201)

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Title of Paper:Energy-band Alignment of (hfo2)(x)(al2o3)(1-x) Gate Dielectrics Deposited by Atomic Layer Deposition on Beta-ga2o3 (-201)

Journal:Applied Surface Science

Correspondence Author:元磊

Volume:433

Issue:Mar.1

Page Number:530-534

Translation or Not:No

Date of Publication:2018-03-01

Date:2024-04-09

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