Influence of Metal Gate Electrodes on Electrical Properties of Atomic-layer-deposited Al-rich Hfalo/ga2o3 Moscaps
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Title of Paper:Influence of Metal Gate Electrodes on Electrical Properties of Atomic-layer-deposited Al-rich Hfalo/ga2o3 Moscaps
Journal:IEEE Transactions on Electron Devices
Correspondence Author:元磊
Volume:67
Issue:4
Page Number:1730-1736
Translation or Not:No
Date of Publication:2020-04-01
Date:2024-04-08